Surface Generation Process in Conditioning Ring Type Polishing (1st Report)

نویسندگان

چکیده

برای دانلود رایگان متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Pad conditioning in chemical mechanical polishing: a conditioning density distribution model to predict pad surface shape

Abstract: Diamond disc pad conditioning is traditionally employed to restore pad planarity and surface roughness in chemical mechanical polishing (or planarisation) (CMP). In this paper, a conditioning density distribution model is developed to predict the pad surface shape resulted from the diamond disc conditioning in CMP. A kinematic study is carried out to calculate and simulate the diamond...

متن کامل

Study of Traverse Grinding Process (1st Report) Accumulation Phenomenon and Size Generation Mechanism in Traverse Grinding

plicated processes on the wheel surf ace along the wheel width. In order to make these processes clear, the experimental analysis of traverse grinding was conducted by widely changing the speed ratio, Kv, the setting depth of wheel, ‡TMT, and the number of total steps, m, (the ratio of the wheel width over the traverse feed per one revolution of the workpiece). The following results were obtain...

متن کامل

Shooting Type Polishing Machine

a rahalt-chromium (Co-Cr) alloy using a centrifugal shooting type polishing machine. In tha present work, we examined the effects of the texture of polishing particle and polishing time on the surface roughness of Co-Cr alloy cast specimens. Nine differcnt textures of polishing par'ticle were investigated wiLh respect to core material and paTticle abrasiveness: three (lifferent elastic body cer...

متن کامل

Process modeling for robotic polishing

This paper presents the solutions adopted for a robotic polishing cell for mold manufacturing. Mold finishing is frequently carried out manually; these kinds of operations are iterative, time consuming and require experience. Automation can introduce cost reduction minimizing production times on such manual finishing operations. The research shown in this paper provides an overall solution with...

متن کامل

Real time motion generation and control for biped robot -1st report: Walking gait pattern generation-

Generating stable dynamic motions for a biped robot in real time is difficult due to the unstable nature of biped systems and their high degrees of freedom. We propose an approximate dynamics model for biped robots with three masses and no kinematic constraints. We also propose a relaxed boundary condition called “the divergent component of motion”. These techniques allow us to generate walking...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: Journal of the Japan Society of Precision Engineering

سال: 1983

ISSN: 0374-3543

DOI: 10.2493/jjspe1933.49.201